Laser-Plasma and Laser-Matter Interactions Laboratory

COMPex Series

The COMPex series of excimer lasers are highly efficient tools, featuring compact design, easy installation and operation. The innovative modular laser design provides easy access to all service and maintenance areas on one side of the unit. The COMPex series is designed for low to medium power requirements. All COMPex lasers are equipped with Lambda Physik's revolutionary NovaTube® technology providing stable laser performance, reduced maintenance and the lowest operating costs. The COMPex 100 is available in a multigas version, which allows operation in all major wavelengths. The COMPex 200 is available in, both multigas and fluorine versions. Typical gas lifetime of COMPex lasers is in the order of 106 laser pulses, ensuring hands-free operation for weeks. COMPex lasers are used in scientific applications, integrated into compact medical systems, and adapted to industrial applications. Operation of the lasers is as simple as possible, using a handheld keypad with user-friendly function keys and a LCD display. For system integration all COMPex lasers offer a standard RS 232 remote port.

COMPex lasers are certified by the German TÜV (GS Certified) and meet the European CE standard. The electrical safety, radiation, EMI emission and susceptibility, as well as pressure vessel regulation and X-ray emission are all certified for these lasers.

COMPex 100 lasers offer an impressive degree of component integration in a single, compact, housing (126 x 37.5 x 75cm3).

The COMPex models 102 and 201 are fully air-cooled. For the high power models COMPex 110 and 205 water cooling is required. Precision gas temperature stabilization is available as an option, improving the long-term output stability of the laser, especially for operation with ArF gas mixture. This option helps to conserve water.

The COMPex excimer laser series covers a wide range of specifications. The lasers are scaled in energy and reprate and deliver high energies up to 650 mJ and medium output power.